3-D Self-Assembled Soi Mems: An Example of Multiphysics Simulation
نویسندگان
چکیده
MEMS devices are typical systems where multiphysics simulations are unavoidable. In this work, we present possible applications of 3-D self-assembled SOI (Siliconon-Insulator) MEMS such as, for instance, thermal actuators and flow sensors. The numerical simulations of these microsystems are presented. Structural and thermal parts have to be strongly coupled for correctly describing the fabrication process and for simulating the behavior of these 3-D SOI MEMS.
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ورودعنوان ژورنال:
- CoRR
دوره abs/0711.3277 شماره
صفحات -
تاریخ انتشار 2006